US Patent 7273535 Insoluble anode with an auxiliary electrode

Patent 7273535 was granted and assigned to Applied Materials on September, 2007 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7273535

Patent Inventor Names

Dmitry Lubomirsky0

Nicolay Y. Kovarsky0

Yevgeniy (Eugene) Rabinovich0

Date of Patent

September 25, 2007

Patent Application Number

10664277

Date Filed

September 17, 2003

Patent Primary Examiner

Roy King

Patent abstract

A method and apparatus for plating a metal onto a substrate. The apparatus includes a fluid basin configured to contain a plating solution, an anode fluid volume positioned in a lower portion of the fluid basin, a cathode fluid volume positioned in an upper portion of the fluid basin, an ionic membrane positioned to separate the anode fluid volume from the cathode fluid volume, a plating electrode centrally positioned in the anode fluid volume, and a deplating electrode positioned adjacent the plating electrode in the anode fluid volume.