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US Patent 7273408 Paired pivot arm

Patent 7273408 was granted and assigned to Applied Materials on September, 2007 by the United States Patent and Trademark Office.

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Patent abstract

The present invention relates to an apparatus and method for polishing semiconductor substrates. In one embodiment, two polishing heads are mounted on two independent pivoting arms that share one pivot point. Each of the pivoting arms enable the corresponding polishing head direct access to two polishing stations. The polishing system of the present invention provides flexibility and improves throughput.

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Patent Citations Received
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US Patent 11705354 Substrate handling systems
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US Patent 07273408 Paired pivot arm US Patent 7273408 Paired pivot arm

Infobox
Patent Number
0727340800
Patent Number
727340800
Edits on 22 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0727340800
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Infobox
Is a
Patent
Patent
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
072734080
Date of Patent
September 25, 2007
0
Patent Application Number
114384970
Date Filed
May 22, 2006
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=072734080
Patent Primary Examiner
‌
M. Rachuba
0
Edits on 25 Sep, 2022
"Entity importer update"
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Golden AI
edited on 25 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
072734080
Date of Patent
September 25, 2007
0
Patent Application Number
114384970
Date Filed
May 22, 2006
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=072734080
Patent Primary Examiner
‌
M. Rachuba
0
Edits on 17 Jun, 2022
"Entity importer update"
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Golden AI
edited on 17 Jun, 2022
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Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07273408
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"Created via: Entity Importer"
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 US Patent 07273408 Paired pivot arm

Infobox
Is a
Patent
Patent
Current assignee
Applied Materials
Applied Materials
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07273408
Date of patent
September 25, 2007
Patent application number
11438497
Date Filed
May 22, 2006
Patent primary examiner
‌
M. Rachuba

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