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US Patent 7271056 Method of fabricating a trench capacitor DRAM device

Patent 7271056 was granted and assigned to United Microelectronics Corporation on September, 2007 by the United States Patent and Trademark Office.

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Patent abstract

The present invention discloses a STI-first process for making trench DRAM devices. According to the preferred embodiment, the etching recipe for etching the STI region in the memory array is completely compatible with the logic STI process.

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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0727105600
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US Patent 07271056 Method of fabricating a trench capacitor DRAM device US Patent 7271056 Method of fabricating a trench capacitor DRAM device

Infobox
Patent Number
0727105600
Patent Number
727105600
Edits on 29 Apr, 2023
"Entity importer update"
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Golden AI
edited on 29 Apr, 2023
Infobox
Is a
Patent
Patent
0
Current Assignee
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
072710560
Date of Patent
September 18, 2007
0
Patent Application Number
111608530
Date Filed
July 12, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=072710560
Patent Primary Examiner
‌
Brook Kebede
0
Edits on 24 Sep, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 24 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
072710560
Date of Patent
September 18, 2007
0
Patent Application Number
111608530
Date Filed
July 12, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=072710560
Patent Primary Examiner
‌
Brook Kebede
0
Edits on 17 Jun, 2022
"Entity importer update"
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Golden AI
edited on 17 Jun, 2022
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Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07271056
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"Created via: Entity Importer"
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Golden AI
created this topic on 22 Nov, 2021
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 US Patent 07271056 Method of fabricating a trench capacitor DRAM device

Infobox
Is a
Patent
Patent
Current assignee
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07271056
Date of patent
September 18, 2007
Patent application number
11160853
Date Filed
July 12, 2005
Patent primary examiner
‌
Brook Kebede

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