Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ruying Tong0
Wei Cao0
Chen-Jung Chien0
Cheng Horng0
Chyu-Jiuh Torng0
Liubo Hong0
Date of Patent
September 4, 2007
0Patent Application Number
112152760
Date Filed
August 30, 2005
0Patent Primary Examiner
Patent abstract
A structure that is well suited to connecting an MTJ device to a CMOS integrated circuit is described. It is built out of three layers. The bottom layer serves as a seed layer for the center layer, which is alpha tantalum, while the third, topmost, layer is selected for its smoothness, its compatibility with the inter-layer dielectric materials, and its ability to protect the underlying tantalum. A method for its formation is also described.
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