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US Patent 7259675 Process equipment tracking system
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Patent
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Date Filed
March 16, 2005
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Date of Patent
August 21, 2007
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Patent Application Number
11082086
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Patent Citations Received
US Patent 11927888 Method for the tracking and identification of components of lithography systems, and lithography system
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Patent Inventor Names
Michael C. Needling
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Kenneth D. Baker
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George Younan
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Gary Rozenblat
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David Greer
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
7259675
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Patent Primary Examiner
Jeffery Hofsass
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