US Patent 7259573 Surface capacitance sensor system using buried stimulus electrode

A surface capacitance sensor system is implemented as an array of sensor electrodes near the surface of the integrated circuit and an array of stimulus electrodes below the sensor electrodes. Rows of stimulus electrodes are driven by sources while the voltages at the respective sensor electrodes are measured. Voltage measurements at each sensor electrode allow the surface capacitance at each sensor electrode location to be determined. The capacitance data is used to determine the positions of target electrodes above the array surface as required in the location fingerprint artifacts.