US Patent 7258012 Integrated monolithic tri-axial micromachined accelerometer

Patent 7258012 was granted and assigned to University of Florida on August, 2007 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

University of Florida

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

72580120

Patent Inventor Names

Huikai Xie0

Date of Patent

August 21, 2007

Patent Application Number

113632930

Date Filed

February 21, 2006

Patent Primary Examiner

Hezron Williams

Patent abstract

A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure made from the single crystal membrane senses acceleration in each of the three orthogonal directions. At least one electronic circuit can also be disposed on the chip, such as a circuit for driving, detecting, controlling and signal processing.