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US Patent 7257494 Inter-process sensing of wafer outcome

Patent 7257494 was granted and assigned to INFICON on August, 2007 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors

Is a

Patent

Patent attributes

Current Assignee

INFICON

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

72574940

Patent Inventor Names

Chenglong Yang0

Igor Tepermeister0

Craig Garvin0

Steven J. Lakeman0

William T. Conner0

Date of Patent

August 14, 2007

Patent Application Number

111264710

Date Filed

May 11, 2005

Patent Primary Examiner

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Bryan Bui

Patent abstract

A method of monitoring a microelectronic manufacturing process includes the implementation of a monitoring sensor that is configured to operate in an inter-process mode. During an inter-process mode, a first valve is opened in order to initiate transfer of a processing substrate between at least one processing chamber and a transfer chamber. The monitoring sensor is programmed to monitor the interior of the at least one processing chamber only after the first valve is opened.