Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 7, 2007
Patent Application Number
11203236
Date Filed
August 15, 2005
Patent Primary Examiner
Patent abstract
A method for semiconductor defect detection, applied to a wafer test in a semiconductor process. A defect test is implemented for generating redundant information. an abnormal test implemented for generating a first FBM. The redundant information is converted to a second FBM. The first and second FBMs are compared, thereby generating a third FBM according to comparison results.
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