Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroyuki Sugaya0
Date of Patent
August 7, 2007
0Patent Application Number
113627370
Date Filed
February 28, 2006
0Patent Primary Examiner
Patent abstract
A semiconductor device is provided with a substrate with a cavity inside, the substrate including a device formation area located above the cavity, a plurality of trenches formed in the substrate to communicate with the cavity and surround the device formation area, and an oxide film formed around each of the trenches to continuously surround the device formation area.
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