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US Patent 7253410 Charge-control pre-scanning for e-beam imaging

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
September 13, 2005
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Date of Patent
August 7, 2007
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Patent Application Number
11225917
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Patent Citations Received
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US Patent 12080514 Arbitrary electron dose waveforms for electron microscopy
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US Patent 11676792 Sample pre-charging methods and apparatuses for charged particle beam inspection
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US Patent 12087542 Image contrast enhancement in sample inspection
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US Patent 11929232 Systems and methods for charged particle flooding to enhance voltage contrast defect signal
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Patent Inventor Names
John Greene
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Kirk J. Bertsche
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
7253410
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Patent Primary Examiner
Jack I. Berman
Jack I. Berman
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