Patent attributes
A method and apparatus for analyzing a membrane structure by fitting simulated operation data to measured data obtained by X-ray reflectivity measurement to analyze the membrane structure. The analysis result obtained by the fitting can be prevented from falling into a local solution, so as to obtain an analysis result of the membrane structure with high accuracy. The method for analyzing a membrane structure for analyzing a structure of a membrane specimen having a single layer membrane or a multi-layer membrane by an X-ray reflectivity measurement, includes a step of simultaneously analyzing plural pieces of measured data obtained by measuring the membrane specimen under plural sets of measuring conditions different from each other in at least one of a resolution and a dynamic range.
