US Patent 7247819 Substrate heating apparatus

Patent 7247819 was granted and assigned to NGK Insulators on July, 2007 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

NGK Insulators

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7247819

Date of Patent

July 24, 2007

Patent Application Number

11159820

Date Filed

June 23, 2005

Patent Primary Examiner

‌

Sang Paik

Patent abstract

A substrate heating apparatus is provided, including a base group including a plurality of bases, which are arranged substantially into a plate with a gap interposed between the bases, and which form a substrate mounting surface. A resistance heating element provided for at least one of the bases.