Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Keiji Magara0
Koji Hasegawa0
Tomonori Kojimaru0
Toshio Hiroe0
Yoshitaka Abiko0
Date of Patent
July 17, 2007
0Patent Application Number
110438230
Date Filed
January 26, 2005
0Patent Primary Examiner
Patent abstract
A substrate treating apparatus for performing a predetermined treatment of substrates includes a treating tank for storing a treating solution, a holder for holding a plurality of substrates arranged in one direction inside the treating tank, and a bubble generating device for generating bubbles in the treating solution stored in the treating tank. The bubble generating device includes a plurality of cylindrical bodies extending in the one direction and arranged in a direction perpendicular to the one direction. Each of the cylindrical bodies is at least partly formed of a porous member extending in the one direction.
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