Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Stephen P. Long0
Timothy A. Vas0
Timothy M. Betzner0
Date of Patent
July 17, 2007
Patent Application Number
11124832
Date Filed
May 9, 2005
Patent Primary Examiner
Patent abstract
A silicon-based high pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. A bossed container filled with oil is mounted on the substrate and houses a sensor cell. The top surface of the bossed container is flexible and deflects under pressure. By controlling the surface area and the thickness of the top surface, the pressure sensor can be configured to measure a wide range of pressures. The oil transfers pressure from the bossed container to the diaphragm of the sensor cell while protecting the sensor cell from high pressures and harsh media.
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