Patent attributes
A relative pressure sensor comprises two chambers and two separating membranes respectively provided for a process pressure and an ambient pressure. The chambers are separated by a pressure-sensitive element and are filled with a transmission medium. In order to attenuate process-side overload pulses, which act upon the first separating membrane, a hydraulic damper is provided that is placed on the side of the atmosphere between the second separating membrane and the pressure-sensitive element. The pressure-sensitive element is a piezoresistive silicon chip, the transmission medium consists of silicone oil, and the damper is comprised of a filter element made of sintered bronze having 29% porosity and an 11 micrometer pore diameter. The filter element has a length of 8 mm and a diameter of 2 mm.
