US Patent 7239391 Method of analysis of multiple layer samples

Patent 7239391 was granted and assigned to J.A. Woollam Co., Inc. on July, 2007 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

J.A. Woollam Co., Inc.

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

72393910

Patent Inventor Names

Craig M. Herzinger0

Ronald A. Synowicki0

Date of Patent

July 3, 2007

Patent Application Number

110986690

Date Filed

April 2, 2005

Patent Primary Examiner

‌

Roy M Punnoose

Patent abstract

Spectroscopic ellipsometer system(s) mediated methodology for quantifying layer defining parameters in mathematical models of samples which contain a plurality of layers of different materials, at least some of which are absorbing of electromagentic radiation, wherein an acquired data set is not sufficient to allow definite one for one parameter evaluation, and wherein a global fit procedure can be applied to obtain good parameter starting values for use in a parameter evaluating regression procedure.