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US Patent 7231931 System and method for a mass flow controller

Patent 7231931 was granted and assigned to Celerity on June, 2007 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Current Assignee
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Celerity
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
72319310
Patent Inventor Names
William S Valentine0
Joseph A Saggio, Jr.0
Chiun Wang0
John M Lull0
Date of Patent
June 19, 2007
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Patent Application Number
110918240
Date Filed
March 28, 2005
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Patent Primary Examiner
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Ramesh Krishnamurthy
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Patent abstract

A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.

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