Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Joichi Nishimura0
Masami Otani0
Date of Patent
June 12, 2007
0Patent Application Number
110055780
Date Filed
December 6, 2004
0Patent Primary Examiner
Patent abstract
A camera is fixed to a camera fixture extending forward and upward from a rear end of an arm mechanism. The camera picks up the direction of extension of the arm mechanism when the substrate is carried in and out. If a normal still image in a hot plate unit previously recorded and a still image picked up by the camera coincide with each other, a substrate transport robot TR carries in and out the substrate.
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