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US Patent 7228873 Valve design and configuration for fast delivery system

Patent 7228873 was granted and assigned to Applied Materials on June, 2007 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Current Assignee
Applied Materials
Applied Materials
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7228873
Date of Patent
June 12, 2007
Patent Application Number
11432063
Date Filed
May 11, 2006
Patent Primary Examiner
‌
A. Michael Chambers
Patent abstract

Embodiments of the invention relate to a substrate processing chamber. In one embodiment a substrate processing chamber includes a chamber body containing a substrate support, a lid assembly comprising an expanding channel extending from a central portion of the lid assembly to a peripheral portion of the lid assembly and positioned to substantially cover the substrate support, and one or more valves adapted to provide one or more reactants into the chamber body. The valves comprising a valve body having at least two ports comprising a purge inlet and an outlet, a valve seat surrounding one of the ports, an annular groove formed around the valve seat coupling the purge inlet and the outlet, and a diaphragm assembly. The diaphragm assembly comprises a diaphragm movable to contact the valve seat, a piston coupled to the diaphragm, and a cylinder to house the piston.

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