Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Timothy M. Betzner0
Date of Patent
June 12, 2007
0Patent Application Number
111250620
Date Filed
May 9, 2005
0Patent Primary Examiner
Patent abstract
A silicon-based hydrogen pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate that shields the cavity formed by the silicon membrane and cell body from hydrogen permeation. A bossed container filled with an oil material is mounted on the substrate and houses a sensor cell. The oil material may be impregnated with a hydrogen getter material.
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