Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takahiro Sasaki0
Toshihiro Sunaga0
Koshi Hatakeyama0
Date of Patent
June 5, 2007
0Patent Application Number
112640430
Date Filed
November 2, 2005
0Patent Primary Examiner
Patent abstract
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of −0.14 or smaller.
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