Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroaki Uchida0
Date of Patent
May 29, 2007
0Patent Application Number
110296480
Date Filed
January 6, 2005
0Patent Primary Examiner
Patent abstract
The present invention provides a semiconductor wafer comprising an insulated board of sapphire or the like having translucency, which is provided with a positioning orientation flat at a peripheral portion thereof, and a silicon thin film formed over the entire one surface of the insulated board. In the semiconductor wafer, ions are implanted in an area containing the orientation flat at a peripheral portion of the silicon thin film to amorphize silicon. Thus, the translucency at the amorphized spot is eliminated and accurate positioning using the conventional optical sensor can be performed.
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