US Patent 7220810 Polymer film and method for producing the same
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Patent Inventor Names
Akinori Nakano0
Jun Kawahara0
Keizo Kinoshita0
Nobutaka Kunimi0
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Patent abstract
A polymer film having a low dielectric constant is produced polymerizing a raw material gas containing a compound of the formula (1):
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US Patent 07220810 Polymer film and method for producing the same US Patent 7220810 Polymer film and method for producing the same
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Patent Number
07220810
Patent Number
7220810
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US Patent 07220810 Polymer film and method for producing the same
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Is a
Patent jurisdiction
Patent number
07220810
Date of patent
May 22, 2007
Patent application number
11153604
Date Filed
June 16, 2005
Patent primary examiner
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