US Patent 7220652 Metal-insulator-metal capacitor and interconnecting structure
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Patent Inventor Names
Kyung-tae Lee0
Seong-ho Liu0
Yoon-hae Kim0
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Patent abstract
A method of manufacturing a MIM capacitor and a interconnecting structure using a damascene process. The MIM capacitor and the first interconnecting structure can be formed at equal depths.
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US Patent 07220652 Metal-insulator-metal capacitor and interconnecting structure US Patent 7220652 Metal-insulator-metal capacitor and interconnecting structure
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Patent Number
07220652
Patent Number
7220652
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US Patent 07220652 Metal-insulator-metal capacitor and interconnecting structure
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Is a
Patent jurisdiction
Patent number
07220652
Date of patent
May 22, 2007
Patent application number
10901239
Date Filed
July 29, 2004
Patent primary examiner
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