Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 15, 2007
Patent Application Number
11088199
Date Filed
March 24, 2005
Patent Primary Examiner
Patent abstract
There is disclosed a method of processing a substrate, which comprises applying a surfactant or a water soluble polymer agent onto a surface of a substrate to be processed, and sliding a circumferential portion of the substrate and a polishing member against each other to polish the circumferential portion of the substrate.
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