Patent attributes
A physical quantity sensor according to the invention includes a first member, a second member, a sensing member, a temperature detector, a correcting circuit, and a heat conduction path thermally connecting the sensing member and the temperature detector. The sensing member is interposed in contact between the first and the second members and configured to generate an electrical signal as a function of a physical quantity applied thereto through one of the first and the second members. The temperature detector detects a temperature of the sensing member. The correcting circuit corrects the electrical signal generated by the sensing member using the temperature detected by the temperature detector and outputs the corrected electrical signal. The heat conduction path is formed through the second member such that the second member has a thermal resistance along the path less than that of the first member in an application direction of the physical quantity.
