Patent attributes
A capacitive sensor for measuring a dynamical quantity based on a change in capacitance has a semiconductor substrate having a weight supported by beams so as to undergo displacement according to the dynamical quantity. The semiconductor substrate is sandwiched between glass substrates on which fixed electrodes are disposed in a position facing the weight with minute gaps existing between the glass substrates and the weight. A substrate electrode is disposed on one of the glass substrates and contacts a part of the semiconductor substrate. A recess having a size equal to or larger than a contact area in which the semiconductor substrate contacts the substrate electrode is formed in the semiconductor substrate, and a contact electrode is disposed in the recess in contact with the substrate electrode.
