Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuzo Koda0
Tadashi Hori0
Takeshi Shishido0
Yasuyoshi Takai0
Hidetoshi Tsuzuki0
Hiroyuki Ozaki0
Koichiro Moriyama0
Masahiro Kanai0
...
Date of Patent
May 1, 2007
0Patent Application Number
098221910
Date Filed
April 2, 2001
0Patent Primary Examiner
Patent abstract
A chemical-reaction inducing means is provided in an exhaust line connecting a processing space for subjecting a substrate or a film to plasma processing to an exhaust means, and at least either an unreacted gas or byproduct exhausted from the processing space are caused to chemically react without allowing plasma in the processing space to reach the chemical-reaction inducing means, thereby improving the processing ability of the chemical-reaction inducing means to process the unreacted gas or byproduct.
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