Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Schiu Sche0
Yuan Lo0
Deng-Horng Tsai0
Kye-Chyn Ho0
Lung-Yung Lin0
Date of Patent
May 1, 2007
0Patent Application Number
109747120
Date Filed
October 28, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A micro accelerometer including a plurality of proof masses is provided to detect the acceleration of the first axis, the second axis and the third axis. The disclosed micro accelerometer has the advantages of close loop control, mechanical decoupling, and not relying on high aspect ratio manufacturing technology.
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