Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wen-Chang Shih0
Date of Patent
April 24, 2007
Patent Application Number
11160568
Date Filed
June 29, 2005
Patent Primary Examiner
Patent abstract
A surface treatment or a two-step injection molding is used to make an inlaid polishing pad. A surface of the inlaid polishing pad has areas of different rigidity to control the rigidity and compressibility of the inlaid polishing pad. Furthermore, methods of making such an inlaid polishing pads are also disclosed.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
