US Patent 7205526 Methods of fabricating layered lens structures

Patent 7205526 was granted and assigned to Micron Technology on April, 2007 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Micron Technology

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7205526

Date of Patent

April 17, 2007

Patent Application Number

10740597

Date Filed

December 22, 2003

Patent Primary Examiner

‌

Stephone B. Allen

Patent abstract

A microlens structure includes lower lens layers on a substrate. A sputtered layer of glass, such as silicon oxide, is applied over the lower lens layers at an angle away from normal to form upper lens layers that increase the effective focal length of the microlens structure. The upper lens layers can be deposited in an aspherical shape with radii of curvature longer than the lower lens layers. As a result, small microlenses can be provided with longer focal lengths. The microlenses are arranged in arrays for use in imaging devices.