US Patent 7205240 HDP-CVD multistep gapfill process
Patent 7205240 was granted and assigned to Applied Materials on April, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 4, 2003
Date of Patent
April 17, 2007
Patent Application Number
10456611
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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