Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sean W. King0
Andrew W. Ott0
Date of Patent
April 3, 2007
0Patent Application Number
110288840
Date Filed
January 3, 2005
0Patent Primary Examiner
Patent abstract
Embodiments of the invention provide a device with a hard mask layer between first and second ILD layers. The hard mask layer may have a k value approximately equal to the first and/or second ILD layers.
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