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US Patent 7196295 Two-wire layered heater system

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
November 21, 2003
Date of Patent
March 27, 2007
Patent Application Number
10719327
Patent Citations Received
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US Patent 12135147 Sensor system and integrated heater-sensor for measuring and controlling performance of a heater system
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US Patent 12062554 Progressive heating of components of substrate processing systems using TCR element-based heaters
0
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US Patent 12074049 Permanent secondary erosion containment for electrostatic chuck bonds
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US Patent 12085609 Thermal control wafer with integrated heating-sensing elements
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US Patent 11756807 Power feeding mechanism and method for controlling temperature of a stage
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US Patent 11908715 Dynamic temperature control of substrate support in substrate processing system
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US Patent 11984296 Substrate support with improved process uniformity
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US Patent 12000885 Multiplexed thermal control wafer and coldplate
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US Patent 12013432 Thermal control wafer with integrated heating-sensing elements
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US Patent 12061227 Integrated heater and temperature measurement
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7196295
Patent Primary Examiner
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Robin Evans

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