Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert Bristol0
Mark Doczy0
Michael Chan0
Date of Patent
March 27, 2007
0Patent Application Number
112170080
Date Filed
August 30, 2005
0Patent Primary Examiner
Patent abstract
A method for cleaning optics in a chamber. The method can include introducing a first etchant into a chamber that encloses an optical component and a source of electromagnetic radiation that is suitable for lithography, ionizing the first etchant, and removing debris from a surface of the optical component.
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