US Patent 7194903 Suspension mechanism for high performance accelerometers

A suspension diaphragm (16) is configured to support a precision transducer (14) within a container (12). The suspension diaphragm (16) is buttressed by an underlying complaint preform (152) and an annular hybrid support (16B) disposed along the periphery of an opening of the container (12). The transducer (14) is affixed to the suspension diaphragm (16) using the compliant preform (152) and rigid epoxy in the securing channels (120). The annular hybrid support (16B) is affixed to the exterior of the container (12).