Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuichiro Sasaki0
Hisataka Kanada0
Ichiro Nakayama0
Tomohiro Okumura0
Bunji Mizuno0
Date of Patent
March 20, 2007
0Patent Application Number
105327680
Date Filed
November 18, 2003
0Patent Primary Examiner
Patent abstract
A method of plasma doping in which dilution of B2H6 is maximized for enhanced safety and stable plasma generation and sustention can be carried out without lowering of doping efficiency and in which the amount of dopant injected can be easily controlled. In particular, a method of plasma doping characterized in that B2H6 gas is used as a material containing doping impurity while He is used as a substance of high dissociation energy and that the concentration of B2H6 in mixed gas is less than 0.05%.
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