Golden has been acquired by ComplyAdvantage.Read about it here ⟶

‌

US Patent 7189946 Substrate heating device

Patent 7189946 was granted and assigned to NGK Insulators on March, 2007 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

0

Patent attributes

Current Assignee

0

Patent Jurisdiction

United States Patent and Trademark Office

0

Patent Number

Patent Inventor Names

Hideyoshi Tsuruta0

Yoshinobu Goto0

Date of Patent

March 13, 2007

0

Patent Application Number

111024620

Date Filed

April 8, 2005

0

Patent Citations Received

US Patent 12062554 Progressive heating of components of substrate processing systems using TCR element-based heaters

0

US Patent 11908715 Dynamic temperature control of substrate support in substrate processing system

0

Patent Primary Examiner

0

Patent abstract

A substrate heating device is provided, including a ceramic base plate having a heating surface on which a substrate is placed, resistance heating elements buried in the ceramic base plate corresponding to a plurality of zones into which the heating surface is divided, terminals respectively connected to the resistance heating elements, and lead wires respectively connected to the terminals and wired on an outer surface of the ceramic base plate other than the heating surface.

Timeline

No Timeline data yet.

Further Resources

Title

Author

Link

Type

Date

No Further Resources data yet.

References

Find more entities like US Patent 7189946 Substrate heating device

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.

Open Query Tool

Golden Query Tool

By using this site, you agree to our Terms of Service.