Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasuyuki Tanabe0
Masami Urano0
Shouji Yagi0
Tomomi Sakata0
Hiromu Ishii0
Katsuyuki Machida0
Date of Patent
March 13, 2007
0Patent Application Number
112435500
Date Filed
October 4, 2005
0Patent Primary Examiner
Patent abstract
In a micromachine according to this invention, a polyimide film is formed on the surface of each electrode. The polyimide film is formed as follows. A substrate having each electrode and a counterelectrode are dipped in an electrodeposition polyimide solution, and a positive voltage is applied to the electrode. A material dissolved in the electrodeposition polyimide solution is deposited on a surface of the positive-voltage-applied electrode that is exposed in the solution, thus forming a polyimide film on the surface.
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