Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
James M. O'Connor0
Date of Patent
March 13, 2007
0Patent Application Number
108387180
Date Filed
May 3, 2004
0Patent Primary Examiner
Patent abstract
A robust single-chip hydrogen sensor and a method for fabricating such a sensor. By utilizing an interconnect metallization material that is the same or similar to the material used to sense hydrogen, or that is capable of withstanding an etchant used to pattern a hydrogen sensing portion, device yields are improved over prior techniques.
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