Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zhiping Yin0
Eden Zielinski0
Fred Fishburn0
Date of Patent
March 6, 2007
0Patent Application Number
113288650
Date Filed
January 9, 2006
0Patent Primary Examiner
Patent abstract
A method of depositing a non-conductive barrier layer onto a metal surface wherein the resistance of the metal remains substantially unchanged before and after the non-conductive barrier layer deposition. The deposition process provides a low temperature processing environment so as to inhibit the formation of impurities such as silicide in the metal, wherein the silicide can adversely increase the resistance of the underlying metal.
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