Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Keisuke Nakazawa0
Date of Patent
February 27, 2007
Patent Application Number
10865812
Date Filed
June 14, 2004
Patent Primary Examiner
Patent abstract
Disclosed in a semiconductor device comprising a semiconductor substrate, and a ferroelectric layer provided above the semiconductor substrate and sandwiched between a lower electrode and an upper electrode, the lower electrode comprising a strontium ruthenate film having a thickness of 2 nm or less.
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