US Patent 7178398 Coplanar proofmasses employable to sense acceleration along three axes

An apparatus in one example comprises a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third acceleration along a third input axis. The first input axis, the second input axis, and the third input axis are substantially orthogonal. The first proofmass, the second proofmass, and the third proofmass are substantially coplanar.