Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 13, 2007
Patent Application Number
11152862
Date Filed
June 15, 2005
Patent Primary Examiner
Patent abstract
The present invention features a metallic resistive heater and uses thereof. The resistive heater includes a metallic component that is electrically conductive (i.e., has low resistivity) and an oxide, nitride, carbide, and/or boride derivative of the metallic component that is electrically insulating (i.e., has high resistivity). The resistivity is controlled in part by controlling the amount of oxide, nitride, carbide, and boride formation during the deposition of the metallic component and the derivative.
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