US Patent 7169283 Anodization device and anodization method
Patent 7169283 was granted and assigned to Tokyo Electron on January, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 21, 2003
0
Date of Patent
January 30, 2007
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Patent Application Number
10471574
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Patent Inventor Names
Kazutsugu Aoki
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Yasushi Yagi
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Mitsuru Ushijima
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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