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US Patent 7166232 Method for producing a solid body including a microstructure

Patent 7166232 was granted and assigned to Micronas on January, 2007 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
1

Patent attributes

Current Assignee
Micronas
Micronas
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
71662321
Patent Inventor Names
Guenter Igel1
Mirko Lehmann1
Date of Patent
January 23, 2007
1
Patent Application Number
104338751
Date Filed
December 21, 2000
1
Patent Primary Examiner
‌
Anita Alanko
1
Patent abstract

According to a method for producing a solid body (1) including a microstructure (2), the surface of a substrate (3) is provided with a masking layer (6) that is impermeable to a substance to be applied. The substance is then incorporated into the substrate regions not covered by the masking layer (6). A heat treatment is used to diffuse the substance into a substrate region covered by the masking layer (6) such that a concentration gradient of the substance is created in the substrate region covered by the masking layer (6), proceeding from the edge of the masking layer (6) inward with increasing distance from the edge. The masking layer (6) is then removed to expose the substrate region under this layer, and a near-surface layer of the substrate (3) in the exposed substrate region is converted by a chemical conversion reaction into a coating (9) which has a layer thickness profile corresponding to the concentration gradient of the substance contained in this near-surface layer. A supplementary treatment is implemented in a subsection of the coating (9) in which the thickness of the coating (9) is reduced.

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