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US Patent 7161347 Test head for semiconductor integrated circuit tester

Patent 7161347 was granted and assigned to Credence Systems on January, 2007 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
‌
Credence Systems
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
71613470
Patent Inventor Names
Wesley G. Stanley0
Will A. Miller0
David R. Trine0
Date of Patent
January 9, 2007
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Patent Application Number
111780920
Date Filed
July 8, 2005
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Patent Primary Examiner
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Vinh Nguyen
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Patent abstract

A test head for a semiconductor integrated circuit tester includes a main support structure defining a device interface board location, and a contact support frame that is displaceable relative to the main support structure for engaging a device interface board at the device interface board location. The contact support frame is composed of a first frame member having a first surface region that is directed towards the device interface board location and also having an opposite second surface region, a second frame member having a first surface region in spaced confronting relationship with the second surface region of the first frame member and also having an opposite second surface region, and a resilient mechanism effective between the first and second frame members for permitting the first frame member to move relative to the second frame member when force is applied to the second frame member at the second surface region thereof for displacing the contact support frame towards the device interface board location.

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