US Patent 7160821 Method of depositing low k films
Patent 7160821 was granted and assigned to Applied Materials on January, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 27, 2004
0
Date of Patent
January 9, 2007
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Patent Application Number
10765361
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Patent Inventor Names
Yung-Cheng Lu
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Tzu-Fang Huang
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Wai-Fan Yau
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Yeming Jim Ma
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David W. Cheung
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Ellie Yieh
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Farhad K. Moghadam
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Ju-Hyung Lee
0
Kuowei Liu
0
Li-Qun Xia
0
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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