US Patent 7160416 Substrate treating apparatus
Patent 7160416 was granted and assigned to Dainippon Screen Mfg Co on January, 2007 by the United States Patent and Trademark Office.
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A substrate treating apparatus for treating substrates as immersed in a treating solution includes a treating tank for storing the treating solution and accommodating the substrates, a holding mechanism for holding a plurality of substrates in upstanding posture in the treating tank, and a drive mechanism for revolving the holding mechanism about a virtual horizontal axis extending in a direction of alignment of the plurality of substrates. The plurality of substrates are treated, while the holding mechanism holding the plurality of substrates is immersed in the treating solution, and the drive mechanism is operated to revolve the plurality of substrates about the horizontal axis.
US Patent 07160416 Substrate treating apparatus US Patent 7160416 Substrate treating apparatus
US Patent 07160416 Substrate treating apparatus
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